基于双耦合点微环系列传感器的研究

Photoelectronic Technology Committee Conferences Pub Date : 2015-04-13 DOI:10.1117/12.2179267

Xin Li, Shi‐Liang Guo, Ruiqi Piao, Ming Yang

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引用次数: 0

摘要

提出了一种基于微环串联的湿度传感器，该传感器通过检测光谱漂移来测量湿度。实验结果表明，该传感器的灵敏度可达到16pm/10%RH左右，湿度传感器的传感范围为10~60%RH。该结构将为实现结构简单、灵敏度高、成本低的一体化湿度传感器提供有效途径。

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Study of a sensor based on the series of micro-rings with dual coupling points

A novel type of humidity sensor based on the series of micro-rings with the same radius is proposed, and the humidity is measured by detecting the spectrum drift. Experimental results show the sensitivity can achieve about 16pm/10%RH and the sensing range of the humidity sensor is 10~60%RH. The proposed structure will provide an effective way for integrated humidity sensors with simple structure, high sensitivity and low cost.

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Photoelectronic Technology Committee Conferences

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