溅射激光电离光谱法和二次离子质谱法分析银/金合金

G. Havrilla, M. Nicholas, S. Bryan, J. Pruett
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引用次数: 0

摘要

定量表面分析一直是几个研究小组使用离子束溅射和激光光电离的目标。已发表的工作已经证明了使用共振和非共振电离方案的痕量水平检测限。(1-4)SIMS对表面层的量化要求标准矩阵与未知数相匹配。这样做的原因是在SIMS中,电离过程与溅射过程密切相关。共振电离需要校准标准,但由于溅射和电离步骤是分开的,因此可以获得涵盖广泛矩阵的校准。另一方面,非共振可以使用矩阵元素的内部比率来提供快速调查分析。这项工作比较了共振和非共振电离方法与SIMS的银/金合金系统。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Analysis of Ag/Au Alloy by Sputter Initiated Laser Ionization Spectrometry and Secondary Ion Mass Spectrometry
Quantitative surface analysis has been the goal of several research groups using ion beam sputtering followed by laser photoionization. Published work has demonstrated trace level detection limits using both resonance and non-resonance ionization schemes.(1-4) Quantification of surface layers by SIMS requires that the standards be matrix matched to the unknowns. The reason for this is that in SIMS, the ionization process is intimately tied to the sputtering process. Resonance ionization requires calibration standards, however since the sputtering and ionization steps are separated, calibrations can be obtained that cover a wide range of matrices. Non-resonance on the other hand can use internal ratios to the matrix elements to provide rapid survey analyses. This work compares resonance and nonresonance ionization methods with SIMS for a silver/gold alloy system.
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