带有阻尼的机电系统步进定位算法

C. Kempf
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引用次数: 8

摘要

提出并应用了一种带阻尼的机电系统快速步进定位算法。该控制器结合了次优砰砰轨迹和平滑过渡到线性状态反馈控制器。这项工作继承了现有的近似时间最优控制方法,并通过在植物模型中加入阻尼和放宽对允许状态反馈增益的限制,扩展了这些方法的适用性。通过在设计中考虑阻尼,可以获得允许更高速度的轨迹轮廓;移动时间的改进在具有显著阻尼和长时间移动的系统中最为明显。该控制器应用于微电子制造中直接驱动的定位台。讨论了实现问题,实验结果表明了该技术的有效性。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
A step and settle positioning algorithm for electro-mechanical systems with damping
An algorithm for rapid step and settle positioning of electro-mechanical systems with damping is developed and applied. The controller combines a sub-optimal bang-bang trajectory with a smooth transition to a linear state feedback controller. This work follows from existing proximate time optimal control methods and extends the applicability of such methods by including damping in the plant model and relaxing a restriction on the allowable state feedback gains. By considering damping in the design, a trajectory profile that allows higher velocities is possible; the improvement in moving times is most apparent in systems with significant damping and for long moves. The controller is applied to a direct drive positioning table used in microelectronics manufacturing. Implementation issues are discussed and experimental results show the effectiveness of the technique.
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