一种铥硅混合微盘激光器

K. M. Kiani, H. Frankis, C. M. Naraine, Dawson B. Bonneville, A. Knights, J. Bradley
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引用次数: 1

摘要

硅光子学技术通过利用几十年来为集成硅电子技术开发的材料和先进制造方法,在芯片上实现紧凑,低功耗和经济高效的光学微系统。硅晶圆代工厂现在提供高性能光学电路所需的许多标准构建模块,包括无源元件,如光波导,滤波器和(解)多路复用器和有源光电元件,如高速调制器,开关和光电探测器。然而,由于硅是一种较差的发光材料,芯片上的光源仍然是代工产品的一个重大挑战。目前的光源集成方法被认为是复杂的,需要不兼容和/或昂贵的材料和加工步骤。本文报道了一种由铥硅混合微盘谐振器组成的超紧凑硅光子激光器。微盘设计简单,与所有硅光子学铸造厂的制造步骤和器件尺寸兼容,而增益介质是在后端(最后一步)添加的,即室温溅射沉积。这种方法允许低成本和大批量的晶圆级制造和光源与硅无源和有源器件的协集成,而无需调整标准工艺流程。混合激光器在约1.6 {\mu}m的标准电信波长泵浦,发射约1.9 {\mu}m,这是一个新兴的频谱区域,对通信,非线性和量子光学以及硅传感具有重要意义。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
A Thulium-Silicon Hybrid Microdisk Laser
Silicon photonics technology enables compact, low-power and cost-effective optical microsystems on a chip by leveraging the materials and advanced fabrication methods developed over decades for integrated silicon electronics. Silicon foundries now provide many standard building blocks required for high-performance optical circuits, including passive components such as optical waveguides, filters and (de-)multiplexors and active optoelectronic components such as high-speed modulators, switches and photodetectors. However, because silicon is a poor light emitting material, on-chip light sources are still a significant challenge for foundry offerings. Current light-source integration methods are viewed as complex, requiring incompatible and/or expensive materials and processing steps. Here we report on an ultra-compact silicon photonic laser consisting of a thulium-silicon hybrid microdisk resonator. The microdisk design is straightforward and compatible with the fabrication steps and device dimensions available in all silicon photonics foundries, whereas the gain medium is added in a backend (final step), room temperature sputter deposition. This approach allows for low-cost and high-volume wafer-scale manufacturing and co-integration of light sources with silicon passive and active devices with no adjustment to standard process flows. The hybrid laser is pumped at standard telecom wavelengths around 1.6 {\mu}m and emits around 1.9 {\mu}m, which is within an emerging spectral region of significant interest for communications, nonlinear and quantum optics, and sensing on silicon.
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