硅技术中的新型微机械膜开关

Proceedings of the Forth-Seventh IEEE Holm Conference on Electrical Contacts (IEEE Cat. No.01CH37192) Pub Date : 2001-09-10 DOI:10.1109/HOLM.2001.953198

K. Hiltmann, A. Schumacher, K. Guttmann, E. Lemp, H. Sandmaier, W. Lang

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引用次数: 10

摘要

本文介绍了一种新一代的微机械薄膜开关，该开关由玻璃衬底和硅薄膜组成。在外部驱动时，两个平面衬底触点由沉积在开关膜上的金属层闭合。开关位置恒定到优于1 /spl mu/m，并且在12 V和10 mA的电负载下，在达到2000万机电循环的寿命期间，观察到开关位置移动约0.7 /spl mu/m。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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New micromachined membrane switches in silicon technology

This paper presents a new generation of micromachined membrane switches containing a glass substrate and a silicon membrane. Upon external actuation, two planar substrate contacts are closed by a metal layer deposited on the switching membrane. The switching position is constant to better than 1 /spl mu/m and has been observed to move about 0.7 /spl mu/m over the achieved lifetime of 20 million electromechanical cycles under electrical loads of 12 V and 10 mA.

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Proceedings of the Forth-Seventh IEEE Holm Conference on Electrical Contacts (IEEE Cat. No.01CH37192)

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