不同振动模态的复合压电陶瓷盘的实验研究与建模

I. Sikorova, J. Nosek, M. Kolar
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摘要

该贡献涉及压电盘状谐振器的机械振动的实验研究和建模,该谐振器附着在机械夹紧的金属膜上,从而产生复合谐振器结构,即所谓的超声治疗换能器。该换能器以1兆赫的典型频率以一定的声强振动,超声波传播到生物组织中。复合结构中的压电元件由PZT陶瓷制成;夹紧的钛膜被调谐到谐振器的频率。由于需要精确调整换能器的频率(它暴露在空气和其他物质的声学环境中),因此有必要知道振动复合谐振器的频谱。这受到许多参数的影响。调整这种复合结构在制造过程中不是一个简单的步骤,因为膜的加工是不可逆的。本文完成了对压电谐振器耦合振动解析解方法的研究,包括确定直径/厚度比的PZT盘形谐振器的频谱。然而,这种方法在真正的超声换能器谐振结构(即附着在机械夹紧的金属膜上的圆盘状谐振器)的情况下失败了。因此,必须采用有限元方法来求解结构的振动特性。在所描述的情况下,采用标准的IEEE阻抗/导纳测量方法和FEM模拟。结果允许在谐振频率方面对复合压电陶瓷谐振器的适用性进行评估,并将金属膜调谐到适当的谐振频率。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Experimental investigations and modelling of a composite piezoceramic disc with different modes of vibrations
This contribution deals with the experimental investigations and modelling of the mechanical vibrations of the piezoelectric disc-shaped resonator, attached to a mechanically clamped metal membrane, which creates the composite resonator structure, the so called ultrasound therapy transducer. This transducer vibrates with a certain acoustic intensity at the typical frequency of 1 MHz, and the ultrasound waves are propagated into biologic tissue. The piezoelectric element in the composite structure is made from PZT ceramics; the clamped titanium membrane is tuned to the frequency of the resonator. Since a precise adjustment of the frequency of the transducer (which is exposed to the acoustical milieu of the air and other substances) is required, it is necessary to know the frequency spectrum of the vibrating composite resonator. This is influenced by a number of parameters. Tuning this composite structure is not a simple step in the manufacturing process, because the machining of the membrane is irreversible. In this paper, the completed investigations of the approach to the analytical solution of coupled vibrations of the piezoelectric resonators are presented, including the frequency spectra of the PZT disc-shaped resonator with a defined ratio of the diameter/thickness. However, this approach fails in the case of the real ultrasound transducer resonant structure (i.e., the disc-shaped resonator attached to the mechanically clamped metal membrane). Therefore the behavior of the vibrating structure has to be solved by some FEM method. In the described case the standard IEEE impedance/admittance measurement method and FEM simulation were used. The results allow an assessment of the suitability of the composite piezoceramic resonator in the terms of resonant frequencies, and tuning of the metal membrane to the appropriate resonant frequency.
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