气体气氛对碳纳米管阴极激光表面处理的影响

Technical Digest of the 17th International Vacuum Nanoelectronics Conference (IEEE Cat. No.04TH8737) Pub Date : 2004-07-11 DOI:10.1116/1.1868698

W. Rochanachirapar, K. Murakami, N. Yamasaki, S. Abo, F. Wakaya, M. Takai, A. Hosono, S. Okuda

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引用次数: 6

摘要

比较了空气、N/亚2/和O/亚2/大气中激光辐照后碳纳米管阴极的I-V特性，探讨了空气各组分对阴极的影响。在O/sub 2/中辐照的碳纳米管阴极的I-V特性得到了显著改善，而在N/sub 2/中辐照的碳纳米管阴极的I-V特性几乎没有改善。研究了激光辐照碳纳米管阴极时的O/sub /压力依赖性。在6.6 V//spl mu/m的电场下，激光在空气中辐照的发射电流密度提高了200倍。在10/sup / Pa / 0/sup / 2/ Pa的激光照射下，发射电流提高了400倍，发射点数量急剧增加。发射电流密度随压力的增大而增大。激光诱导氧化是提高紫外激光辐照电子发射性能的主要机制。

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Influence of gas atmosphere during laser surface treatment of CNT cathode

The I-V characteristics of carbon nanotube (CNT) cathodes after laser irradiation in air, N/sub 2/ and O/sub 2/ atmospheres have been compared to investigate the influence of each component of air. The I-V characteristic of CNT cathodes irradiated in O/sub 2/ was drastically improved, while there was almost no improvement in I-V characteristics irradiated in N/sub 2/. The O/sub 2/ pressure dependence during laser irradiation to CNT cathodes was also examined. The emission current density at an applied field of 6.6 V//spl mu/m was increased by a factor of 200 for laser irradiation in air. The emission current was enhanced by a factor of 400 for laser irradiation in 10/sup 5/ Pa of O/sub 2/ and the number of emission sites was drastically increased. The emission current density increased with an increase in pressure. The mechanism for drastic improvement in electron emission by UV laser irradiation is via laser-induced oxidation.

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Technical Digest of the 17th International Vacuum Nanoelectronics Conference (IEEE Cat. No.04TH8737)

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