用于光学聚合物波导紧凑布线的集成微镜

2009 IEEE LEOS Annual Meeting Conference Proceedings Pub Date : 2009-12-01 DOI:10.1109/LEOS.2009.5343491

T. Lamprecht, R. Beyeler, R. Dangel, F. Horst, D. Jubin, N. Meier, J. Weiss, B. Offrein

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引用次数: 3

摘要

我们报道了集成在光学聚合物波导中的微反射镜。反射镜是在波导核心定义步骤之前制造的，并且基于选择性湿化学金属化工艺。

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Integrated micro-mirrors for compact routing of optical polymer waveguides

We report on micro-mirrors integrated in optical polymer waveguides. The mirrors are fabricated prior to the waveguide core definition step and are based on a selective wet-chemical metallization process.

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2009 IEEE LEOS Annual Meeting Conference Proceedings

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