带感应分配器的金属蒸汽有源元件

2020 21st International Conference of Young Specialists on Micro/Nanotechnologies and Electron Devices (EDM) Pub Date : 2020-06-01 DOI:10.1109/EDM49804.2020.9153513

K. Semenov, V. F. Fedorov, D. Shiyanov, M. Trigub

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引用次数: 0

摘要

本文介绍了双能量源金属气相活性元素的研制。第一源提供所述工作物质所需的蒸汽压力;第二个源用于泵送活性介质。感应分配器加热采用谐振式逆变器。本文考虑了有源元件和中试装置的设计，并通过气体放电管的发电波形、电流波形和电压波形来验证其可操作性。电感分配器用作工作物质-金属原子的汽化器。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Metal Vapor Active Element with Inductive Dispenser

The paper presents the development of metal vapor active element with two energy sources. The first source provides the required vapor pressure of the work substance; the second source is used to pump active media. The resonant inverter was used for the inductive dispenser heating. The paper considers the design of the active element and the pilot plant which operability confirmed by waveforms of generation, current and voltage of a gas discharge tube. The inductive dispenser is used as a vaporizer of the working substance - metal atoms.

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来源期刊

2020 21st International Conference of Young Specialists on Micro/Nanotechnologies and Electron Devices (EDM)

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