电子应用的中尺度沉积技术

M. Hedges, M. Renn, M. Kardos
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引用次数: 17

摘要

对更小、更强大、更经济的电子系统的不断追求,导致了一种新的制造技术的发展,即无掩膜中尺度材料沉积(M3D)。没有掩模或抗蚀剂,低至10微米的特征可以直接写入各种材料,包括金属,陶瓷,聚合物和粘合剂,几乎任何表面材料-硅,玻璃,聚合物,金属和陶瓷。对于耐低温的聚合物衬底,M3D通过激光扫描工艺局部处理沉积。最终的结果是高质量的薄膜具有优异的边缘清晰度和接近体的电子性能。作为CAD驱动的增材制造工艺,M3D提供了显着的环境效益和降低的加工要求,消除了与传统减法(例如掩模和蚀刻)工艺相关的浪费。M3D还可以精确地在非平面基板上沉积材料。除了沉积流外,工具的任何部分都不与基板发生物理接触,因此很容易实现保形书写。其他好处包括:•时间压缩和提高制造灵活性,•更低的成本和•更好的产品设计。本文将详细介绍M3D技术在为电子组装和半导体封装应用创建中尺度特征方面的好处。它将概述当前的一些应用领域,包括电子领域的聚合物沉积。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Mesoscale Deposition Technology for Electronics Applications
The continual drive for smaller, more powerful and economic electronic systems, has led to the development of a new manufacturing technology, Maskless Mesoscale Materials Deposition (M3D). Without masks or resists, features down to 10 microns can be directly written in a wide variety of materials, including metals, ceramics, polymers and adhesives, on virtually any surface material - silicon, glass, polymers, metals and ceramics. For polymer substrates with a low temperature tolerance, M3D locally processes the deposition through a laser scanning process. The end result is a high-quality thin film with excellent edge definition and near-bulk electronic properties. As a CAD driven, additive manufacturing process, M3D provides significant environmental benefits and reduced processing requirements, eliminating the waste associated with traditional subtractive (e.g. mask and etch) processes. M3D can also precisely deposit materials on non-planar substrates. With no physical contact with the substrate by any portion of the tool other than the deposition stream, conformal writing is easily achieved. Other benefits include: • Time Compression and Increased Manufacturing Agility, • Lower Costs and • Better Product Designs. This paper will detail the benefits of M3D technology in creating mesoscale features for electronics assembly and semiconductor packaging applications. It will outline some of the current application areas including polymer deposition for electronics.
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