A. Kębłowski, W. Gawron, P. Martyniuk, D. Stępień, K. Kolwas, J. Piotrowski, P. Madejczyk, M. Kopytko, A. Piotrowski, A. Rogalski
{"title":"热红外探测器用HgCdTe薄膜MOCVD生长研究进展","authors":"A. Kębłowski, W. Gawron, P. Martyniuk, D. Stępień, K. Kolwas, J. Piotrowski, P. Madejczyk, M. Kopytko, A. Piotrowski, A. Rogalski","doi":"10.1117/12.2229077","DOIUrl":null,"url":null,"abstract":"In this paper we present progress in MOCVD growth of (100) HgCdTe epilayers achieved recently at the Institute of Applied Physics, Military University of Technology and Vigo System S.A. It is shown that MOCVD technology is an excellent tool in fabrication of different HgCdTe detector structures with a wide range of composition, donor/acceptor doping and without post grown annealing. Particular progress has been achieved in the growth of (100) HgCdTe epilayers for long wavelength infrared photoconductors operated in HOT conditions. The (100) HgCdTe photoconductor optimized for 13-μm attain detectivity equal to 6.5x109 Jones and therefore outperform its (111) counterpart. The paper also presents technological progress in fabrication of MOCVD-grown (111) HgCdTe barrier detectors. The barrier device performance is comparable with state-of-the-art of HgCdTe photodiodes. The detectivity of HgCdTe detectors is close to the value marked HgCdTe photodiodes. Dark current densities are close to the values given by “Rule 07”.","PeriodicalId":222501,"journal":{"name":"SPIE Defense + Security","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2016-05-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":"{\"title\":\"Progress in MOCVD growth of HgCdTe epilayers for HOT infrared detectors\",\"authors\":\"A. Kębłowski, W. Gawron, P. Martyniuk, D. Stępień, K. Kolwas, J. Piotrowski, P. Madejczyk, M. Kopytko, A. Piotrowski, A. Rogalski\",\"doi\":\"10.1117/12.2229077\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In this paper we present progress in MOCVD growth of (100) HgCdTe epilayers achieved recently at the Institute of Applied Physics, Military University of Technology and Vigo System S.A. It is shown that MOCVD technology is an excellent tool in fabrication of different HgCdTe detector structures with a wide range of composition, donor/acceptor doping and without post grown annealing. Particular progress has been achieved in the growth of (100) HgCdTe epilayers for long wavelength infrared photoconductors operated in HOT conditions. The (100) HgCdTe photoconductor optimized for 13-μm attain detectivity equal to 6.5x109 Jones and therefore outperform its (111) counterpart. The paper also presents technological progress in fabrication of MOCVD-grown (111) HgCdTe barrier detectors. The barrier device performance is comparable with state-of-the-art of HgCdTe photodiodes. The detectivity of HgCdTe detectors is close to the value marked HgCdTe photodiodes. Dark current densities are close to the values given by “Rule 07”.\",\"PeriodicalId\":222501,\"journal\":{\"name\":\"SPIE Defense + Security\",\"volume\":\"1 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2016-05-20\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"3\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"SPIE Defense + Security\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1117/12.2229077\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"SPIE Defense + Security","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.2229077","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 3
摘要
本文介绍了军事工业大学应用物理研究所和Vigo System S.A.最近在(100)HgCdTe薄膜的MOCVD生长方面取得的进展。结果表明,MOCVD技术是制造不同组成、供体/受体掺杂和不需要生长后退火的不同HgCdTe探测器结构的良好工具。在高温条件下,长波红外光导体用(100)HgCdTe薄膜的生长取得了特别的进展。(100) HgCdTe光导体优化为13 μm,获得的探测率等于6.5x109 Jones,因此优于(111)光导体。本文还介绍了mocvd生长(111)HgCdTe势垒探测器的制备技术进展。势垒器件的性能可与最先进的HgCdTe光电二极管相媲美。HgCdTe探测器的探测率接近HgCdTe光电二极管的标记值。暗电流密度接近“规则07”给出的值。
Progress in MOCVD growth of HgCdTe epilayers for HOT infrared detectors
In this paper we present progress in MOCVD growth of (100) HgCdTe epilayers achieved recently at the Institute of Applied Physics, Military University of Technology and Vigo System S.A. It is shown that MOCVD technology is an excellent tool in fabrication of different HgCdTe detector structures with a wide range of composition, donor/acceptor doping and without post grown annealing. Particular progress has been achieved in the growth of (100) HgCdTe epilayers for long wavelength infrared photoconductors operated in HOT conditions. The (100) HgCdTe photoconductor optimized for 13-μm attain detectivity equal to 6.5x109 Jones and therefore outperform its (111) counterpart. The paper also presents technological progress in fabrication of MOCVD-grown (111) HgCdTe barrier detectors. The barrier device performance is comparable with state-of-the-art of HgCdTe photodiodes. The detectivity of HgCdTe detectors is close to the value marked HgCdTe photodiodes. Dark current densities are close to the values given by “Rule 07”.