Phase measurement system for meta-lens

In recent years, Meta-lens has become a new type of optical device, showing excellent performance and novel applications. The nanoantennas of meta-lens can be used to control the phase, amplitude, and polarization at well. The phase part is the most important part of the function of the meta-lens. However, so far, the phase distribution of meta-lenses has not been directly measured, which further hinders the quantitative evaluation of their performance. We have developed an interferometric imaging phase measurement system for meta-lens and meta-devices. This system can measure the phase distribution by shooting the interference pattern. The phase distribution of meta-lenses can be measured to quantitatively characterize the imaging performance. Our meta-lens phase measurement system can help for designers to optimize the design, for manufacturers to identify defects, thereby improving the manufacturing process. This work will pave the way for meta-lens in industrial applications.