F. Maspero, V. F. López-Rey, L. Joet, S. Hentz, G. Langfelder
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Combined electronics and algorithm development for offset drift characterization in MEMS accelerometers
The work discusses methods for the characterization of the sensor-related offset drift component in MEMS capacitive accelerometers. It is shown how, even with discrete electronics, it is not trivial to isolate this contribution from electronic-related components, due to unavoidable electronics tolerances and drift. A method that involves the use of multiple (at least two), nominally identical boards, pre-characterized in terms of temperature drift, is shown to be effective in identifying sensor-related drift components with an accuracy as low as sub-50 μg/K. At the same time, the developed board reaches high-resolution performance, in order to clearly highlight the Brownian noise limit (40 μg/√Hz) in the tested consumer-grade accelerometers.
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