红外焦平面阵列调制传递函数的评估

J. Schuster
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摘要

红外(IR)探测器社区一直致力于制造具有更小像素间距的探测器,其最终目标是LWIR成像的5µm和MWIR成像的3µm。理想情况下,如此小的像素间距将显著改善调制传递函数(MTF),特别是在较长的空间频率下。MTF是所有相机的关键性能指标(FOM),它描述了光学系统在不同空间频率下再现图像中物体对比度的效果。然而,高性能红外探测器历来都是由InSb或HgCdTe等材料制成的。这些半导体具有各向同性的材料特性,例如,沿平面内和生长方向的空穴迁移率相等。然而,具有各向异性材料特性的红外吸收材料,如基于InAs/GaInSb或InAs/InAsSb的II型超晶格(T2SL)材料已经越来越普遍。其中,孔迁移率沿面内方向比生长方向大得多。除了具有各向异性材料特性外,与几何上相同的探测器相比,这些具有各向异性材料特性的探测器预计具有更高的像素间串扰和劣化的MTF。分析了MTF作为像素间距的函数,比较了各向同性和各向异性材料特性的探测器,以评估使用像素间距小于10µm的T2SL探测器进行成像的潜力。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Assessment of the Modulation Transfer Function in Infrared Focal Plane Arrays
There is a perpetual drive in the infrared (IR) detector community to fabricate detectors with smaller pixel pitches where the ultimate goals are 5 µm for LWIR imaging and 3 µm for MWIR imaging. Such small pixel pitches ideally will result in significantly improving the modulation transfer function (MTF), especially at longer spatial frequencies. The MTF is a key figure of merit (FOM) in all cameras that describes how well an optical system reproduces an objects contrast in the image at different spatial frequencies. However, high performance IR detectors have historically been fabricated out of materials such as InSb or HgCdTe. These semiconductors have material properties that are isotropic, e.g., the hole mobilities along the in-plane and growth directions are equal. However, IR absorbing materials with anisotropic material properties, such as type II superlattice (T2SL) materials, based on InAs/GaInSb or InAs/InAsSb, have become increasingly prevalent. Specifically, the hole mobility is much larger along the in-plane direction than the growth direction. These detectors with anisotropic material properties have been predicted to have higher inter-pixel crosstalk and degraded MTF compared to geometrically identical detectors except with isotropic material properties. The MTF as a function of pixel pitch is analyzed, comparing detectors with isotropic versus anisotropic material properties, to assess the potential of using T2SL detectors with pixel pitches less than 10 µm for imaging.
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