在单甲板双轴精密工作台中,PMLSM驱动引起的推力脉动映射系统的开发

F. Kuo, C. Western, J. Yen
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引用次数: 0

摘要

永磁直线同步电机(pmlsm)在工业精密阶段的应用越来越受欢迎。虽然pmlsm在阶段中最大限度地减少了摩擦和其他不良影响,但它们会引起推力波动,这严重影响了设备的控制,最近已成为研究的重点。本文介绍了一种创新的机构的设计和实现,该机构用于测量目前正在开发的pmlsm驱动的精密平面工作台的运动平面上的二维推力脉动。该装置限制在一个方向上的运动,并使用称重传感器在设备的工作范围内间隔测量垂直方向上的阶段推力。测量了推力随位置和q轴输入电流大小的变化。研究结果支持了波状、位置相关的pmlsm诱导推力脉动在阶段运动方向上的假设,并对此类装置的控制系统的开发具有指导意义。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Development of a system for mapping of thrust ripple induced by PMLSM drives in a single-deck, dual-axis precision stage
Permanent magnet linear synchronous motors (PMLSMs) are becoming increasingly popular for implementation in industrial precision stages. While PMLSMs minimize friction and other undesirable effects in the stages, they induce thrust ripple, which significantly affects control of the devices and has recently been the subject of concentrated research. This paper presents the design and implementation of an innovative mechanism for measuring thrust ripple in two dimensions over the plane of motion of a PMLSM-driven precision planar stage that is currently in development. The device restricts motion in one direction and uses a load cell to measure stage thrust force in the perpendicular direction at intervals across the device's operating range. The variation of thrust force in relation to position as well as q-axis input current magnitude was measured. Results support the assumption of wavelike, position-dependent PMLSM-induced thrust ripple in the direction of stage motion and have implications in the development of control systems for such devices.
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