On-Chip Integrated Antennas for 200 GHz Applications

This paper presents four different on-chip antenna elements. They are two bow-tie antennas, one slotted and one fractal version, a half cloverleaf antenna and a stacked Vivaldi antenna. All antenna elements are designed for an operational frequency of 200 GHz for wireless computer board-to-board and chip-to-chip communication. The antenna elements were successfully designed and fabricated in a 130 nm SiGe semiconductor technology. After fabrication, S-parameter and radiation characteristics measurements were conducted on a wafer probe station. The results presented show good agreement with the simulated designs. The gain of the antenna elements is above 0 dBi and all elements achieve a bandwidth larger than 10 GHz.