{"title":"半导体晶圆厂自动化物料搬运系统的容量分析","authors":"M. Kuhl, J. Christopher","doi":"10.1109/WSC.2004.1371556","DOIUrl":null,"url":null,"abstract":"A critical aspect of semiconductor manufacturing is the design and analysis of material handling and production control polices to optimize fab performance. As wafer sizes have increased, semiconductor fabs have moved toward the use of automated material handling systems (AMHS). However, the behavior of AMHS and the effects of AMHS on fab productivity is not well understood. This research involves the development of a design and analysis methodology for evaluating the throughput capacity of AMHS. A set of simulation experiments is used to evaluate the throughput capacity of an AMHS and the effects on fab performance measures. The analysis uses SEMATECH fab data for full semiconductor fabs to evaluate the AMHS throughput capacity.","PeriodicalId":287132,"journal":{"name":"Online World Conference on Soft Computing in Industrial Applications","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2004-12-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"4","resultStr":"{\"title\":\"Capacity analysis of automated material handling systems in semiconductor fabs\",\"authors\":\"M. Kuhl, J. Christopher\",\"doi\":\"10.1109/WSC.2004.1371556\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A critical aspect of semiconductor manufacturing is the design and analysis of material handling and production control polices to optimize fab performance. As wafer sizes have increased, semiconductor fabs have moved toward the use of automated material handling systems (AMHS). However, the behavior of AMHS and the effects of AMHS on fab productivity is not well understood. This research involves the development of a design and analysis methodology for evaluating the throughput capacity of AMHS. A set of simulation experiments is used to evaluate the throughput capacity of an AMHS and the effects on fab performance measures. The analysis uses SEMATECH fab data for full semiconductor fabs to evaluate the AMHS throughput capacity.\",\"PeriodicalId\":287132,\"journal\":{\"name\":\"Online World Conference on Soft Computing in Industrial Applications\",\"volume\":\"1 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2004-12-05\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"4\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Online World Conference on Soft Computing in Industrial Applications\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/WSC.2004.1371556\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Online World Conference on Soft Computing in Industrial Applications","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/WSC.2004.1371556","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Capacity analysis of automated material handling systems in semiconductor fabs
A critical aspect of semiconductor manufacturing is the design and analysis of material handling and production control polices to optimize fab performance. As wafer sizes have increased, semiconductor fabs have moved toward the use of automated material handling systems (AMHS). However, the behavior of AMHS and the effects of AMHS on fab productivity is not well understood. This research involves the development of a design and analysis methodology for evaluating the throughput capacity of AMHS. A set of simulation experiments is used to evaluate the throughput capacity of an AMHS and the effects on fab performance measures. The analysis uses SEMATECH fab data for full semiconductor fabs to evaluate the AMHS throughput capacity.
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