M. Tachiki, E. Morita, Kenji Yamada, X. Fang, Takeshi Kobayashi
{"title":"先进脉冲激光沉积法(月食角)","authors":"M. Tachiki, E. Morita, Kenji Yamada, X. Fang, Takeshi Kobayashi","doi":"10.1117/12.300700","DOIUrl":null,"url":null,"abstract":"In spite of the advantage of droplet reduction in the pulsed laser deposition (PLD) process, eclipse PLD method has some drawbacks that activated growth species are also shielded by the shadow mask, and deposition rate decreases in low ambient pressure condition. In this study, we proposed new composite shadow mask method named 'eclipse angel PLD method' to overcome this problem. We directly observed the emitting plume propagating through the ring-mask structure and reaching the substrate by the ultra fast camera, and confirmed growth rate enhancement of YBa2Cu3Ox thin films in low ambient oxygen pressure region. Also, did we the effects of Ar addition when are of favor to improve the film qualities of Bi-layered crystals.","PeriodicalId":362287,"journal":{"name":"Thin Film Physics and Applications","volume":"3175 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1998-02-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":"{\"title\":\"Advanced pulsed laser deposition method (eclipse angle)\",\"authors\":\"M. Tachiki, E. Morita, Kenji Yamada, X. Fang, Takeshi Kobayashi\",\"doi\":\"10.1117/12.300700\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In spite of the advantage of droplet reduction in the pulsed laser deposition (PLD) process, eclipse PLD method has some drawbacks that activated growth species are also shielded by the shadow mask, and deposition rate decreases in low ambient pressure condition. In this study, we proposed new composite shadow mask method named 'eclipse angel PLD method' to overcome this problem. We directly observed the emitting plume propagating through the ring-mask structure and reaching the substrate by the ultra fast camera, and confirmed growth rate enhancement of YBa2Cu3Ox thin films in low ambient oxygen pressure region. Also, did we the effects of Ar addition when are of favor to improve the film qualities of Bi-layered crystals.\",\"PeriodicalId\":362287,\"journal\":{\"name\":\"Thin Film Physics and Applications\",\"volume\":\"3175 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1998-02-20\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"3\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Thin Film Physics and Applications\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1117/12.300700\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Thin Film Physics and Applications","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.300700","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
In spite of the advantage of droplet reduction in the pulsed laser deposition (PLD) process, eclipse PLD method has some drawbacks that activated growth species are also shielded by the shadow mask, and deposition rate decreases in low ambient pressure condition. In this study, we proposed new composite shadow mask method named 'eclipse angel PLD method' to overcome this problem. We directly observed the emitting plume propagating through the ring-mask structure and reaching the substrate by the ultra fast camera, and confirmed growth rate enhancement of YBa2Cu3Ox thin films in low ambient oxygen pressure region. Also, did we the effects of Ar addition when are of favor to improve the film qualities of Bi-layered crystals.
求助内容：
应助结果提醒方式：
京公网安备 11010802042870号
