光伏材料硒化的快速温度处理(RTP)系统

M. Warzecha, H. Jankowski, L. Maksymowicz, T. Pisarkiewicz, C. Worek
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引用次数: 0

摘要

快速温度处理(RTP)方法因其高质量的制备电池和大规模生产的前景而广泛应用于薄膜光伏材料技术。本文介绍了一种用于铜/铟或铜/铟/硒前驱体硒化的石墨反应器RTP装置结构。辐射能量传递的强非线性给RTP控制带来了困难,因此仍需进一步改进。利用该装置的数学模型,提出了过程控制方法。给出了实验得到的快速温度过程的温度分布,并与典型的CIS硒化石墨反应器的温度分布进行了比较。在此基础上提出的转向方法,在减少硒化时间的同时,降低了过程成本。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Rapid temperature processing (RTP) system for selenization of photovoltaic materials
Rapid Temperature Processing (RTP) methodology is widely applied in thin-film photovoltaic materials technology due to high quality of fabricated cells and also perspectives for their mass manufacturing. This paper describes a RTP device structure which contains the graphite reactor for selenization of Cu/In or Cu/In/Se precursors. Strong nonlinearity of radiative energy transfer makes RTP controlling difficult so it still needs to be improved. Using mathematical model of the device, we are proposing the method of process controlling. Experimentally obtained temperature profiles of Rapid Temperature Processes are presented and compared with temperature profile of typical CIS selenization graphite reactor. Presented steering procedure, based on our model, gives improves by decreasing time needed for selenization and simultaneously reducing costs of the process.
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