粗糙度测量干涉装置

Conference Digest. 2000 Conference on Lasers and Electro-Optics Europe (Cat. No.00TH8505) Pub Date : 2000-09-10 DOI:10.1109/CLEOE.2000.910141

P. Maksimyak, O. Angelsky

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引用次数: 0

摘要

只提供摘要形式。提出了一种基于剪切偏振干涉仪的干涉法测量表面粗糙度。它基于RPS方法，其前提是:(i)无限扩展的物体(物体散射的辐射的所有空间频率分量都存在于配准区内);(ii)目标的相位方差较小;(iii)非均匀性的相关长度大于波长。

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Interference device for roughness measurement

Summary form only given. We propose an interference method based on a shearing polarisation interferometer for measuring surface roughness. It is based on the RPS approach, which preassumes: (i) infinitely extended object (all spatial frequency components of the radiation scattered by the object are present in registration zone); (ii) phase variance of the object is small; (iii) the correlation length of the inhomogeneity is larger than the wavelength.

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Conference Digest. 2000 Conference on Lasers and Electro-Optics Europe (Cat. No.00TH8505)

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