真空三极开关击穿特性分析

Wu Nan, L. Xiaoming, Chen Hai, Zhang Yanyan
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引用次数: 0

摘要

针对三电极开关系统,基于粒子的扩散、碰撞、电离和激发,利用有限元方法建立了等离子体的流体化学模型。模拟了三极开关系统在真空和SF6中自击穿的微观过程。模拟结果清楚地揭示了从初始放电到等离子体通道形成的物理过程。与SF6相比,真空条件下等离子体通道的电子数更多,电子温度更低。为准确、全面地揭示三电极开关系统的物理机理,找到提高系统性能的方法奠定了理论基础。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Analysis on breakdown characteristics of triple-electrode switch in vacuum
Aiming at the system of triple-electrode switch, the fluid-chemistry model of plasma is established based on the particles' diffusion, collision, ionization and excitation and the finite element method. The micro process of self-breakdown of triple-electrode switch system is simulated in vacuum and SF6. The simulation results clearly revealed that the physical process from initial discharge to plasma channel formed. The plasma channel has more electron number in vacuum compared with it in SF6, and the electron temperature is lower. It lays a theoretical foundation for accurately and fully revealing the physical mechanism of the triple-electrode switch system and helping to find the method to improve the performance of the system.
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