多波长VCSEL阵列通过分级间隔层波分复用应用

2008 International Nano-Optoelectronics Workshop Pub Date : 2008-09-26 DOI:10.1109/INOW.2008.4634513

P. Dayal, J. Nakajima, T. Sakaguchi, A. Matsutani, F. Koyama

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引用次数: 2

摘要

在本文中，我们提出了一个0.98 μ m的四通道VCSEL阵列，该阵列采用分级SiO2间隔层制备。使用8.5对SiO2/Ta2O5反射镜，最大波长跨度达到5.4 nm。此外，还提出了利用表面纳米加工技术制造晶圆上精确间隔层梯度的方法。

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Multiple-wavelength VCSEL array by grading a spacer layer for WDM applications

In this paper we present a 0.98 mum 4-channel VCSEL array fabricated with grading a SiO2 spacer layer. A maximum of 5.4 nm wavelength span has achieved using 8.5 pairs of SiO₂/Ta₂O₅ mirror. Also, surface nanomachining process is presented for making on-wafer precise spacer-layer gradients.

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2008 International Nano-Optoelectronics Workshop

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