重新审视砷化镓中电子迁移率对掺杂剂的依赖性

Christoph Kopf, G. Kaiblinger-Grujin, H. Kosina, S. Selberherr
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引用次数: 7

摘要

我们研究了掺杂物对砷化镓中电子迁移率的影响。根据描述单个杂质离子电荷密度的托马斯-费米理论,我们得出了散射率的分析表达式。将这些结果应用于蒙特卡罗计算,我们发现当浓度超过 cm 时,电子迁移率与供体种类之间存在显著的依赖关系。随着浓度的增加,两者之间的差异越来越大,原子序数越大的离子,其迁移率值越低。在少数电子迁移率方面,我们预测迁移率与掺杂剂的关系并不明显。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Reexamination of Electron Mobility Dependence on Dopants in GaAs
The influence of dopant species on electron mobility in GaAs is investigated. Based on Thomas-Fermi theory to describe the charge density of the individual impurity ion we derive an analytical expression for the scattering rate. Employing these results in a Monte Carlo calculation we fi nda signifi cantdependence of mobility on donor species for concentrations beyond cm . With increasing concentration an increasing difference is observed, ions with larger atomic number lead to lower mobility values. In case of minority electron mobility no signifi cantdopant dependence is predicted.
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