{"title":"使用薄膜悬臂梁的直流接触RF MEMS开关","authors":"Hui Shen, S. Gong, N. S. Barker","doi":"10.1109/EMICC.2008.4772309","DOIUrl":null,"url":null,"abstract":"This paper describes the development of DC-contact RF-MEMS SPST, SP3T, and SP4T switches implemented with a thin-film cantilever. Using aluminium as the sacrificial layer in the fabrication process, flat cantilevers are realized with a measured actuation voltage of 50~70 V. The SPST switch is used as a building block to realize more complicated SP3T and SP4T switches for use in true-time delay phase shifters. The preliminary measurements of the SP3T and SP4T switches demonstrate isolation of 20 dB and insertion loss less than 2 dB up to 50 GHz.","PeriodicalId":344657,"journal":{"name":"2008 European Microwave Integrated Circuit Conference","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2008-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"11","resultStr":"{\"title\":\"DC-Contact RF MEMS Switches using Thin-Film Cantilevers\",\"authors\":\"Hui Shen, S. Gong, N. S. Barker\",\"doi\":\"10.1109/EMICC.2008.4772309\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This paper describes the development of DC-contact RF-MEMS SPST, SP3T, and SP4T switches implemented with a thin-film cantilever. Using aluminium as the sacrificial layer in the fabrication process, flat cantilevers are realized with a measured actuation voltage of 50~70 V. The SPST switch is used as a building block to realize more complicated SP3T and SP4T switches for use in true-time delay phase shifters. The preliminary measurements of the SP3T and SP4T switches demonstrate isolation of 20 dB and insertion loss less than 2 dB up to 50 GHz.\",\"PeriodicalId\":344657,\"journal\":{\"name\":\"2008 European Microwave Integrated Circuit Conference\",\"volume\":\"1 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2008-10-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"11\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2008 European Microwave Integrated Circuit Conference\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/EMICC.2008.4772309\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2008 European Microwave Integrated Circuit Conference","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/EMICC.2008.4772309","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
DC-Contact RF MEMS Switches using Thin-Film Cantilevers
This paper describes the development of DC-contact RF-MEMS SPST, SP3T, and SP4T switches implemented with a thin-film cantilever. Using aluminium as the sacrificial layer in the fabrication process, flat cantilevers are realized with a measured actuation voltage of 50~70 V. The SPST switch is used as a building block to realize more complicated SP3T and SP4T switches for use in true-time delay phase shifters. The preliminary measurements of the SP3T and SP4T switches demonstrate isolation of 20 dB and insertion loss less than 2 dB up to 50 GHz.
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