两个垫铝厚度的铜球粘结剪切试验

D. Andrews, Levi Hill, A. Collins, Kok Inn Hoo, Stevan Hunter
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引用次数: 4

摘要

与金(Au)线键相比,铜(Cu)线键具有更高的强度和刚度。本课题对铜的高抗剪强度进行了研究。目前没有专门针对铜球粘结剪切过程的工业标准,也没有适当的粘结可靠性规范限制。JEDEC工业标准JESD22-B116A《钢丝键合剪切试验方法》于1998年发布,涵盖了剪切金球键合可靠性试验。公司通常将该标准中Au的剪切测试极限应用于制造Al垫片上的Cu球键,尽管Cu键可能比Au球显示出更大的剪切强度。铜线键具有不同的失效模式,因此需要一种独特的铜线键测试方法和可靠性规范限值。安森美半导体进行了实验,比较了两种不同铝厚度上两种铜球直径的剪切测试结果,参与了工业委员会开发新的铜剪切测试程序(正在进行中)。本文提供了从ON实验中选择的数据,与为Au球键开发的极限相比,展示了Cu的行为。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Copper ball bond shear test for two pad aluminum thicknesses
Copper (Cu) wirebonds exhibit higher strength and stiffness as compared to gold (Au) wirebonds. Cu's higher shear strength is studied in this project. There is currently no industry standard specifically for the Cu ballbond shear procedure nor an appropriate bond reliability specification limit. The JEDEC industrial standard JESD22-B116A “Wire Bond Shear Test Method”, issued in 1998, covers Au ball bond reliability testing by shear. Companies typically apply the shear test limits of Au from this standard to Cu ball bonds on Al pads in manufacturing, though the Cu bonds may show significantly more shear strength than Au balls. Cu wirebonds have different failure modes, so a unique test method and reliability spec limit for Cu bonds is needed. ON Semiconductor has conducted experiments comparing shear test results for two Cu ball diameters on two different Al thicknesses, participating in the industrial committee to develop a new Cu shear test procedure (in progress). Selected data from the ON experiments are provided in this paper, demonstrating the behavior of Cu as compared with the limits that were developed for Au ball bonds.
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