表面声波光谱在薄膜物理性质研究中的应用

International Conference and Seminar of Young Specialists on Micro/Nanotechnologies and Electron Devices Pub Date : 2012-07-02 DOI:10.1109/EDM.2012.6310197

V. Shayapov

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引用次数: 0

摘要

讨论了表面声波光谱(SAWS)用于薄膜研究的几种可能性。声波散射法的信息价值取决于声速频散曲线的形式。非线性色散曲线可以得到描述薄膜性质的两个值。线性色散曲线使得只计算一种薄膜的性质成为可能。提出了克服这一限制的特殊方法。用saw研究了碳氮化硼BCxNy和碳氮化硅SiCxNyHz薄膜。它们的密度和杨氏模量是确定的。所得结果与已知的薄膜结构和组成数据相吻合。

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Application of surface acoustic wave spectroscopy for study of physical properties of thin films

Some possibilities of surface acoustic wave spectroscopy (SAWS) for thin films investigation are considered. Information value of SAWS method is dependent on the form of sound velocity dispersion curve. Non-linear dispersion curve allow obtaining of two values of four which describe film's properties. Linear dispersion curve makes it possible to calculate only one film's property. Special approach is presented to overcome this limitation. Boron carbonitride BCxNy and silicon carbonitride SiCxNyHz films are studied by SAWS. Their densities and Young's modules are determined. The results are corresponding to known data on structure and composition of the films.

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International Conference and Seminar of Young Specialists on Micro/Nanotechnologies and Electron Devices

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