{"title":"完整带隙SAW声子谐振器","authors":"V. Yantchev","doi":"10.1109/EFTF.2014.7331487","DOIUrl":null,"url":null,"abstract":"2D composite grating building blocks with hexagonal symmetry are proposed as efficient reflectors and transducers in the design of surface acoustic wave (SAW) resonators. Design parameters ensuring complete bandgap characteristics are deduced by means of finite element analysis (FEA). SAW resonators employing phononic building blocks with complete bandgaps are designed, fabricated and tested. Further, the influence of the phononic grating over the spurious responses and the busbar quality are experimentally tested. All test structures are fabricated on 128 Y-X LiNbO3 using low resolution optical lithography and standard metal deposition and etching routines.","PeriodicalId":129873,"journal":{"name":"2014 European Frequency and Time Forum (EFTF)","volume":"27 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2014-06-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":"{\"title\":\"Complete bandgap SAW phononic resonators\",\"authors\":\"V. Yantchev\",\"doi\":\"10.1109/EFTF.2014.7331487\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"2D composite grating building blocks with hexagonal symmetry are proposed as efficient reflectors and transducers in the design of surface acoustic wave (SAW) resonators. Design parameters ensuring complete bandgap characteristics are deduced by means of finite element analysis (FEA). SAW resonators employing phononic building blocks with complete bandgaps are designed, fabricated and tested. Further, the influence of the phononic grating over the spurious responses and the busbar quality are experimentally tested. All test structures are fabricated on 128 Y-X LiNbO3 using low resolution optical lithography and standard metal deposition and etching routines.\",\"PeriodicalId\":129873,\"journal\":{\"name\":\"2014 European Frequency and Time Forum (EFTF)\",\"volume\":\"27 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2014-06-23\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"2\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2014 European Frequency and Time Forum (EFTF)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/EFTF.2014.7331487\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2014 European Frequency and Time Forum (EFTF)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/EFTF.2014.7331487","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
2D composite grating building blocks with hexagonal symmetry are proposed as efficient reflectors and transducers in the design of surface acoustic wave (SAW) resonators. Design parameters ensuring complete bandgap characteristics are deduced by means of finite element analysis (FEA). SAW resonators employing phononic building blocks with complete bandgaps are designed, fabricated and tested. Further, the influence of the phononic grating over the spurious responses and the busbar quality are experimentally tested. All test structures are fabricated on 128 Y-X LiNbO3 using low resolution optical lithography and standard metal deposition and etching routines.
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