{"title":"电容式MEMS陀螺仪闭环读出电路的连续时间低通和带通ΔΣ-modulators","authors":"S. Rombach, M. Maurer, Y. Manoli","doi":"10.1109/INERTIALSENSORS.2015.7314262","DOIUrl":null,"url":null,"abstract":"This paper presents the design and implementation of electro-mechanical continuous-time bandpass and lowpass ΔΣ-modulators for closed-loop readout of vibratory MEMS gyroscopes. These concepts improve the performance of the readout system in terms of susceptibility to temperature and sensor parameter variations compared to open-loop solutions. Additionally, the linearity and the dynamic range are improved while the power consumption is low. Measurement results are shown of both readout concepts, which demonstrate the competitiveness and the functionality of the readout interfaces.","PeriodicalId":437174,"journal":{"name":"2015 DGON Inertial Sensors and Systems Symposium (ISS)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2015-11-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"5","resultStr":"{\"title\":\"Continuous-time lowpass and bandpass ΔΣ-modulators for closed-loop readout circuits of capacitive MEMS gyroscopes\",\"authors\":\"S. Rombach, M. Maurer, Y. Manoli\",\"doi\":\"10.1109/INERTIALSENSORS.2015.7314262\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This paper presents the design and implementation of electro-mechanical continuous-time bandpass and lowpass ΔΣ-modulators for closed-loop readout of vibratory MEMS gyroscopes. These concepts improve the performance of the readout system in terms of susceptibility to temperature and sensor parameter variations compared to open-loop solutions. Additionally, the linearity and the dynamic range are improved while the power consumption is low. Measurement results are shown of both readout concepts, which demonstrate the competitiveness and the functionality of the readout interfaces.\",\"PeriodicalId\":437174,\"journal\":{\"name\":\"2015 DGON Inertial Sensors and Systems Symposium (ISS)\",\"volume\":\"1 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2015-11-02\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"5\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2015 DGON Inertial Sensors and Systems Symposium (ISS)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/INERTIALSENSORS.2015.7314262\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2015 DGON Inertial Sensors and Systems Symposium (ISS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/INERTIALSENSORS.2015.7314262","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Continuous-time lowpass and bandpass ΔΣ-modulators for closed-loop readout circuits of capacitive MEMS gyroscopes
This paper presents the design and implementation of electro-mechanical continuous-time bandpass and lowpass ΔΣ-modulators for closed-loop readout of vibratory MEMS gyroscopes. These concepts improve the performance of the readout system in terms of susceptibility to temperature and sensor parameter variations compared to open-loop solutions. Additionally, the linearity and the dynamic range are improved while the power consumption is low. Measurement results are shown of both readout concepts, which demonstrate the competitiveness and the functionality of the readout interfaces.
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