单极与双极全贫硅在绝缘体MOSFET上的比较研究

S. Devi, Avtar Singh, R. Lorenzo, S. Chaudhury
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引用次数: 5

摘要

本文研究了在不同的技术节点上,单栅全耗尽SOI (SGSOI)和双栅全耗尽SOI (DGSOI) MOSFET在栅极周围采用Si3N4隔离层(绝缘体)进行了比较。在SIVACO工具的ATLAS包中进行了仿真。在这项工作中,进一步研究了SON器件(以空气代替埋藏氧化物的结构被称为无基硅(SON))。仿真分析了驱动电流(Ion)、泄漏电流(Ioff)和传输特性(Id/Vg)的不同取值,并进行了比较,得出了适合本研究的结论。为了比较短通道效应的抑制值,重新计算了不同结构下的漏阻降低(DIBL)。在纳米环境下对所有结构进行了单栅极和双栅极的模拟。根据垂直源漏双栅结构的模拟结果,给出了对比结果。研究了通道长度减小对其传输特性和短通道效应的影响。研究发现,与SOI结构相比,SON结构具有较大的阈值电压和较小的驱动电流。因此,由于其低泄漏电流,它似乎更适合低功耗应用。与单栅SOI结构相比,双栅SOI结构具有足够的驱动电流和更小的漏电流。为了分析器件的性能,采用了Shockley-Read-Hall (SRH)重组、辐射重组、螺旋重组和表面重组模型。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Comparative study of Single Gate And Double Gate Fully Depleted Silicon on Insulator MOSFET
In this paper, a comparison between Single Gate Fully Depleted SOI (SGSOI) and Double Gate Fully Depleted SOI (DGSOI) MOSFET with Si3N4 Spacer (insulator) around the Gate electrode at various different technology nodes are investigated. Simulations are done in ATLAS package of SIVACO tool. Further in this work, study of SON Devices (structure with air in place of buried oxide is termed as Silicon on Nothing (SON) are carried out. Simulation of Different values of Drive Current (Ion), Leakage Current (Ioff) and Transfer Characteristics (Id/Vg) are analysed in addition to compare and get a suitable conclusion of this study. For comparing the suppressed values of Short Channel Effects, Drain Induced Barrier Lowering (DIBL) with these different structuresarecalculated. All the structures are simulated for Single Gate as well as Double Gate in nanometerregime. Comparative results are given on the basis of the simulated results received by the double gate structure with Vertical Source and Drain (SD). Effect of Channel length reduction on its transfer characteristics and short channel effects are also studied. It has been found that SON structure shows larger threshold voltage value but small drive current as compare to SOI structures. Hence due to its low leakage current, it seems to be better for low power applications. Double gate SOI structure showsa sufficient drive current and less leakage current as compare to single gate SOI. For analysing the performance of the devices, Shockley-Read-Hall (SRH) Recombination, Radiative, Auger, and Surface Recombination models are deployed.
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