可重写n通道FAMOS器件的退化机制

R. Dockerty
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引用次数: 2

摘要

采用浮动多晶硅栅极和人工智能控制栅极制备了电可重写n沟道FAMOS器件。铝栅用于控制雪崩漏极扩散产生的空穴或电子注入浮栅。讨论了浮栅的电荷保留和多次写/擦除循环引起的器件退化。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Degradation Mechanisms in Rewritable N-Channel FAMOS Devices
Electrically rewritable n-channel FAMOS devices were fabricated with a floating polycrystalline silicon gate and an Al control gate. The Al gate is used to control injection of holes or electrons from the avalanching drain diffusion onto the floating gate. Charge retention by the floating gate and device degradation due to multiple write/erase cycling is discussed.
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