溅射和逐层堆叠技术制备的异芯光纤Au/TiO2 SPR传感器的温度特性

Koji Yuhashi, M. Nishiyama, J. Ida, S. Kubodera, Kazuhiro Watanabe
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引用次数: 1

摘要

在本文中,我们提出了一种采用溅射和逐层(LbL)堆叠技术形成Au和TiO2多层膜的异质芯光纤温度传感器。TiO2是一种具有较大温度折射率系数的材料。在我们之前的工作中,我们已经提出了一种基于表面等离子体共振(SPR)的异芯光纤温度传感器,该传感器利用溅射形成的Au和TiO2,可以测量低于50°C的温度。温度传感器的灵敏度随着在光纤上形成的TiO2薄膜厚度的增加而提高。为了提高TiO2薄膜的沉积速率,我们尝试用LbL技术来形成TiO2薄膜。实验证实,在900 nm和850 nm波长范围内,溅射法制备Au/TiO2多层膜和LbL法制备的Au/TiO2多层膜对异芯光纤SPR传感器光损耗变化的灵敏度分别为1.5 × 10-3 dB/°C和2.9 × 10-3 dB/°C。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Temperature characteristics of hetero-core optical fiber Au/TiO2 SPR sensors fabricated by sputtering and Layer-by-Layer stacking techniques
In this paper, we proposed hetero-core optical fiber temperature sensors with an Au and TiO2 multilayer film formed by the sputtering and Layer-by-Layer (LbL) stacking technique. A TiO2 is known as a material with a relatively large temperature coefficient of refractive index. In our previous work, a hetero-core fiber optic temperature sensor based on surface Plasmon resonance (SPR) utilizing the Au and TiO2 formed by the sputtering has been proposed, which could measure the temperature less than 50 °C. The sensitivity of the temperature sensor improves with increasing thickness of the TiO2 film formed on the optical fiber. In order to improve the deposition rate of the TiO2 thin film, we tried to form the TiO2 film by the LbL technique. We experimentally confirmed that the sensitivities in the optical loss change of the hetero-core fiber SPR sensor with the Au/TiO2 multilayer film made by the sputtering and by the LbL method were 1.5 × 10-3 dB/°C and 2.9 × 10-3 dB/°C with ranging from 100 to 300 °C at the wavelength of 900 nm and 850 nm, respectively.
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