惯性力传感器采用光学马赫-曾德尔干涉仪和多模干涉仪

Masato Suzuki, G. Kawai, K. Nishioka, Tomokazu Takahashi, S. Aoyagi, Y. Amemiya, Masataka Fukuyama, S. Yokoyama
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引用次数: 0

摘要

提出了一种采用晶体硅马赫-曾德尔干涉仪型光波导的新型惯性力传感器。在该传感器中,MZI的一个分支波导具有浮梁结构,并与悬臂梁相交,以支撑同一平面上的证明质量。为了防止交叉处的光损耗,只有浮动波导的交叉点具有多模干涉(MMI)结构。仿真和实验结果验证了MMI波导的有效性。最后,成功地通过施加的力改变了所制造的初始力传感器的输出。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Inertial force sensor using optical Mach-Zehnder Interferometer and multi mode interferometer
In this paper, a novel inertial force sensor which uses a Mach-Zehnder Interferometer (MZI) type optical waveguide made of crystal silicon is proposed. In this sensor, one branched waveguide of the MZI have floating beam structure, and it is intersected with a cantilever for supporting a proof mass in same plane. To prevent optical loss at the intersection, only the intersectional point of floating waveguide has multi-mode interference (MMI) structure. Efficacy of the MMI waveguide is confirmed by simulation and experimental results. Conclusively, it has succeeded in changing in output of the fabricated initial force sensor by applied force.
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