高功率激光光学保形涂层用HfO2 PEALD薄膜的研制

Optical Interference Coatings Conference (OIC) 2022 Pub Date : 1900-01-01 DOI:10.1364/oic.2022.tc.2

A. Szeghalmi, V. Beladiya, S. Alam, S. Schröder, S. Riese

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引用次数: 0

摘要

在这里，我们讨论了用于激光应用的HfO2 PEALD薄膜的发展。介绍了355,532和1064nm波长的增透涂层和介质反射镜及其抗激光损伤性能。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Development of HfO2 PEALD Thin Films for the Conformal Coating of High Power Laser Optics

Here, we discuss the development of HfO2 PEALD thin films for laser applications. Antireflection coatings and dielectric mirrors for 355, 532 and 1064 nm wavelength and their laser damage resistance are presented.

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来源期刊

Optical Interference Coatings Conference (OIC) 2022

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