无氧化层和有氧化层AlInN/InN异质结场效应晶体管的电荷控制研究

M. S. Islam, S. Muhtadi, A. G. Bhuiyan, A. Hashimoto, A. Yamamoto
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引用次数: 0

摘要

本文介绍了一种新型的无氧化层和有氧化层的AlInN/InN异质结场效应晶体管(HFET)。建立了基于一维薛定谔-泊松方程自洽解的电荷控制模型。该模型考虑了高度主导的自发极化效应和压电极化效应,可以更准确地预测异质界面处的二维电子气(2DEG)片密度。计算了In摩尔分数m = 0.1时前两个子能带能量的能带廓线。发现较大的导带偏移约为2.77eV,保证了较好的约束和较高的片电荷密度。当In含量为0.1时,异质界面处的二维电子片密度达到1.21×1014 cm−2,而当栅极下有氧化层时,二维电子片密度变为1.99×1014 cm−2。与传统gan基异质结构中获得的~ 1×1013 cm−2相比,它几乎增加了一个数量级。该分析有望为评价AlInN/InN异质结构场效应晶体管的性能和优化其设计提供有力的手段。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Charge control studies for an AlInN/InN heterojunction field effect transistor without and with oxide layer
This paper describes a novel AlInN/InN heterojunction field effect transistor (HFET) without and with an oxide layer for high performance. A charge control model based on the self-consistent solution of one dimensional Schrodinger-Poisson equations is developed. The model takes into account the highly dominant spontaneous and piezoelectric polarization effects to predict the two dimensional electron gas (2DEG) sheet density more accurately at the heterointerface. The band profile is calculated for the first two sub band energy for In mole fraction of m = 0.1. A large conduction band offset of about 2.77eV is found, which ensure the better confinement and higher sheet charge density. An extremely high two dimensional electron sheet density of 1.21×1014 cm−2 is calculated at the hetero interface for In content of 0.1, while those using an oxide layer beneath the gate the 2DEG changes to be 1.99×1014 cm−2. It is increased by almost one order of magnitude as compared to ∼1×1013 cm−2 obtained in a conventional GaN-based heterostructure. This analysis is expected to provide powerful means to evaluate the performance of AlInN/InN heterostructure field effect transistors and to optimize their design.
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