C. Cantalini, L. Valentini, I. Armentano, J. Kenny, L. Lozzi, S. Santucci
{"title":"一种利用碳纳米管薄膜进行气体传感的创新方法:灵敏度、选择性和稳定性响应分析","authors":"C. Cantalini, L. Valentini, I. Armentano, J. Kenny, L. Lozzi, S. Santucci","doi":"10.1109/ICSENS.2003.1278972","DOIUrl":null,"url":null,"abstract":"We report that carbon nanotubes (CNTs) thin films have been successfully prepared as new NO/sub 2/ and H/sub 2/ gas sensors in the NO/sub 2/ concentration range 7 ppb - 7 ppm and H2 8.5ppm - 850 ppm respectively. 150 nm thick CNTs thin films, have been prepared by rf-PECVD on Si/Si/sub 3/N/sub 4/ substrates, provided with Pt interdigital sputtered electrodes, and post-annealed under controlled conditions. The electrical response has been investigated at different operating temperatures and gases over a period of 6 months. Sensitivity response analysis has demonstrated that CNTs are more responsive to NO/sub 2/ than H/sub 2/. By selecting suitable annealing conditions, the microstructure significantly changes enabling: to adjust the base line resistance of the film (i.e. the resistance in dry air) from 100 Ohms to several mega-Ohms, and to improve gas sensitivity. Selectivity test have highlighted negligible cross sensitivity effects to the detection of NO/sub 2/, when H/sub 2/ is the interfering gas. Long term stability test have shown a neglegible increase of the base line resistance and an improvement of the NO/sub 2/ sensitivity.","PeriodicalId":369277,"journal":{"name":"Proceedings of IEEE Sensors 2003 (IEEE Cat. No.03CH37498)","volume":"18 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2003-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"9","resultStr":"{\"title\":\"An innovative approach to gas sensing using carbon nanotubes thin films: sensitivity, selectivity and stability response analysis\",\"authors\":\"C. Cantalini, L. Valentini, I. Armentano, J. Kenny, L. Lozzi, S. Santucci\",\"doi\":\"10.1109/ICSENS.2003.1278972\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"We report that carbon nanotubes (CNTs) thin films have been successfully prepared as new NO/sub 2/ and H/sub 2/ gas sensors in the NO/sub 2/ concentration range 7 ppb - 7 ppm and H2 8.5ppm - 850 ppm respectively. 150 nm thick CNTs thin films, have been prepared by rf-PECVD on Si/Si/sub 3/N/sub 4/ substrates, provided with Pt interdigital sputtered electrodes, and post-annealed under controlled conditions. The electrical response has been investigated at different operating temperatures and gases over a period of 6 months. Sensitivity response analysis has demonstrated that CNTs are more responsive to NO/sub 2/ than H/sub 2/. By selecting suitable annealing conditions, the microstructure significantly changes enabling: to adjust the base line resistance of the film (i.e. the resistance in dry air) from 100 Ohms to several mega-Ohms, and to improve gas sensitivity. Selectivity test have highlighted negligible cross sensitivity effects to the detection of NO/sub 2/, when H/sub 2/ is the interfering gas. Long term stability test have shown a neglegible increase of the base line resistance and an improvement of the NO/sub 2/ sensitivity.\",\"PeriodicalId\":369277,\"journal\":{\"name\":\"Proceedings of IEEE Sensors 2003 (IEEE Cat. No.03CH37498)\",\"volume\":\"18 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2003-10-22\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"9\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Proceedings of IEEE Sensors 2003 (IEEE Cat. No.03CH37498)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ICSENS.2003.1278972\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings of IEEE Sensors 2003 (IEEE Cat. No.03CH37498)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICSENS.2003.1278972","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
An innovative approach to gas sensing using carbon nanotubes thin films: sensitivity, selectivity and stability response analysis
We report that carbon nanotubes (CNTs) thin films have been successfully prepared as new NO/sub 2/ and H/sub 2/ gas sensors in the NO/sub 2/ concentration range 7 ppb - 7 ppm and H2 8.5ppm - 850 ppm respectively. 150 nm thick CNTs thin films, have been prepared by rf-PECVD on Si/Si/sub 3/N/sub 4/ substrates, provided with Pt interdigital sputtered electrodes, and post-annealed under controlled conditions. The electrical response has been investigated at different operating temperatures and gases over a period of 6 months. Sensitivity response analysis has demonstrated that CNTs are more responsive to NO/sub 2/ than H/sub 2/. By selecting suitable annealing conditions, the microstructure significantly changes enabling: to adjust the base line resistance of the film (i.e. the resistance in dry air) from 100 Ohms to several mega-Ohms, and to improve gas sensitivity. Selectivity test have highlighted negligible cross sensitivity effects to the detection of NO/sub 2/, when H/sub 2/ is the interfering gas. Long term stability test have shown a neglegible increase of the base line resistance and an improvement of the NO/sub 2/ sensitivity.
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