通过激光烧蚀和抛光直接制造微透镜阵列

M. Kahle, D. Conrad, Stefan Fricke, Larissa Wilkens
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引用次数: 0

摘要

由玻璃制成的微透镜阵列是一种光学元件,由于其复杂性,可以同时实现许多较大透镜的功能。光学装置因此可以小型化和更轻。这些元素的生产可能是一个挑战,特别是对于中、小批量。因此,在ifw Jena,研究了两种直接生产这些元素的方法:用超短脉冲(USP)激光烧蚀和用短脉冲co2激光烧蚀,分别用cw-CO2激光抛光。实验结果表明,透镜均匀性好,处理速度快。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Direct manufacturing of micro lens arrays via laser-ablation and -polishing
Micro lens arrays made of glass are optical components which, due to their complexity, can fulfill the function of many larger lenses at the same time. Optical arrangements can thus be miniaturized and made lighter. The production of such elements can be a challenge, especially for medium and small quantities. Therefore, at the ifw Jena, two direct production methods of such elements are being investigated: laser ablation with ultrashort pulsed (USP) lasers and ablation with a short-pulsed CO2-laser respectively polished with a cw-CO2 laser. The experiments show a good homogeneity of the lenses as well as a high process speed.
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