光子学中硅的III-V积分

J. Reithmaier, M. Benyoucef
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引用次数: 4

摘要

一种基于III-V-Si纳米复合材料的新方法正在开发中,它可能克服大多数这些问题。本文回顾了过去几年在全光电硅基集成平台上取得的一些主要初步成果。这种方法是基于III-V量子点(QDs)的生长直接生长在平面硅或图案表面上。基于GaAs/InAs的核壳几何结构可以获得高质量的光发射。通过用硅过度生长InAs量子点,可以形成嵌入InAs纳米团簇的无缺陷单晶平面硅层。透射电镜研究表明,纳米团簇通过闭环界面位错完全松弛,但没有在硅基体中引发螺纹位错。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
III-V integration on Si for photonics
A new approach based on III-V-Si nanocomposite is under development, which may overcome most of those problems. This paper reviews some of the major initial results gained within the last few years towards a full optoelectronic silicon based integration platform. This approach is based on the growth of III-V quantum dots (QDs) directly grown on either planar silicon or on patterned surfaces. Based on a GaAs/InAs core-shell geometry high quality optical emission could be obtained. By overgrowing InAs QDs with silicon a defect free single crystal planar silicon layer can be formed with embedded InAs nano clusters. Transmission electron microscope investigations show that the nanoclusters fully relax by closed loop interface dislocations but without initiating threading dislocations in the silicon matrix.
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