{"title":"半导体制造多集群工具的稳态吞吐量和调度分析:一种分解方法","authors":"J. Yi, Shengwei Ding, Dezhen Song","doi":"10.1109/ROBOT.2005.1570134","DOIUrl":null,"url":null,"abstract":"Cluster tools are widely used as semiconductor manufacturing equipment. While throughput analysis and scheduling of single-cluster tools have been well-studied, the corresponding research on multi-cluster tools is still at the early stage. This paper analyzes steady-state throughput and scheduling of multi-cluster tools. A decomposition method is utilized to reduce a multi-cluster tool problem to multiple single-cluster tool problems. Existing research on the throughput and scheduling results is then applied to each single-cluster tool. For an M-cluster tool, an O(M) throughput calculation and robot scheduling algorithm is presented. A chemical-mechanical planarization (CMP) polisher is used as an example of the multi-cluster cluster tools to illustrate the proposed decomposition method and algorithms.","PeriodicalId":350878,"journal":{"name":"Proceedings of the 2005 IEEE International Conference on Robotics and Automation","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2005-04-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"43","resultStr":"{\"title\":\"Steady-State Throughput and Scheduling Analysis of Multi-Cluster Tools for Semiconductor Manufacturing: A Decomposition Approach\",\"authors\":\"J. Yi, Shengwei Ding, Dezhen Song\",\"doi\":\"10.1109/ROBOT.2005.1570134\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Cluster tools are widely used as semiconductor manufacturing equipment. While throughput analysis and scheduling of single-cluster tools have been well-studied, the corresponding research on multi-cluster tools is still at the early stage. This paper analyzes steady-state throughput and scheduling of multi-cluster tools. A decomposition method is utilized to reduce a multi-cluster tool problem to multiple single-cluster tool problems. Existing research on the throughput and scheduling results is then applied to each single-cluster tool. For an M-cluster tool, an O(M) throughput calculation and robot scheduling algorithm is presented. A chemical-mechanical planarization (CMP) polisher is used as an example of the multi-cluster cluster tools to illustrate the proposed decomposition method and algorithms.\",\"PeriodicalId\":350878,\"journal\":{\"name\":\"Proceedings of the 2005 IEEE International Conference on Robotics and Automation\",\"volume\":\"1 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2005-04-18\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"43\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Proceedings of the 2005 IEEE International Conference on Robotics and Automation\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ROBOT.2005.1570134\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings of the 2005 IEEE International Conference on Robotics and Automation","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ROBOT.2005.1570134","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Steady-State Throughput and Scheduling Analysis of Multi-Cluster Tools for Semiconductor Manufacturing: A Decomposition Approach
Cluster tools are widely used as semiconductor manufacturing equipment. While throughput analysis and scheduling of single-cluster tools have been well-studied, the corresponding research on multi-cluster tools is still at the early stage. This paper analyzes steady-state throughput and scheduling of multi-cluster tools. A decomposition method is utilized to reduce a multi-cluster tool problem to multiple single-cluster tool problems. Existing research on the throughput and scheduling results is then applied to each single-cluster tool. For an M-cluster tool, an O(M) throughput calculation and robot scheduling algorithm is presented. A chemical-mechanical planarization (CMP) polisher is used as an example of the multi-cluster cluster tools to illustrate the proposed decomposition method and algorithms.