{"title":"一种用于惯性应用的微机电石英转速传感器","authors":"A. Madni, L. A. Wan, S. Hammons","doi":"10.1109/AERO.1996.495986","DOIUrl":null,"url":null,"abstract":"A quartz rotational rate sensor based on the Coriolis effect is presented. The sensor which consists of a microminiature double-ended quartz tuning fork and supporting structure, all fabricated chemically from a single wafer of monocrystalline piezoelectric quartz provides a simple, elegant and reliable measurement of rotational velocity. The theory of operation, performance parameters and applications in the aerospace, industrial, commercial and automotive sectors are provided.","PeriodicalId":262646,"journal":{"name":"1996 IEEE Aerospace Applications Conference. Proceedings","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1996-02-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"28","resultStr":"{\"title\":\"A microelectromechanical quartz rotational rate sensor for inertial applications\",\"authors\":\"A. Madni, L. A. Wan, S. Hammons\",\"doi\":\"10.1109/AERO.1996.495986\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A quartz rotational rate sensor based on the Coriolis effect is presented. The sensor which consists of a microminiature double-ended quartz tuning fork and supporting structure, all fabricated chemically from a single wafer of monocrystalline piezoelectric quartz provides a simple, elegant and reliable measurement of rotational velocity. The theory of operation, performance parameters and applications in the aerospace, industrial, commercial and automotive sectors are provided.\",\"PeriodicalId\":262646,\"journal\":{\"name\":\"1996 IEEE Aerospace Applications Conference. Proceedings\",\"volume\":\"1 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1996-02-03\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"28\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"1996 IEEE Aerospace Applications Conference. Proceedings\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/AERO.1996.495986\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"1996 IEEE Aerospace Applications Conference. Proceedings","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/AERO.1996.495986","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
A microelectromechanical quartz rotational rate sensor for inertial applications
A quartz rotational rate sensor based on the Coriolis effect is presented. The sensor which consists of a microminiature double-ended quartz tuning fork and supporting structure, all fabricated chemically from a single wafer of monocrystalline piezoelectric quartz provides a simple, elegant and reliable measurement of rotational velocity. The theory of operation, performance parameters and applications in the aerospace, industrial, commercial and automotive sectors are provided.
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