{"title":"CVD金刚石生长的激光光谱诊断","authors":"R. Shaw, W. Whitten, J. Ramsey","doi":"10.1364/laca.1992.tha2","DOIUrl":null,"url":null,"abstract":"Chemical vapor deposition (CVD) methods have become increasingly important for the manufacture of technologically-significant thin films. Numerous examples exist in the semiconductor and wear hardening coatings industries. The growth of polycrystalline diamond thin films from light hydrocarbons has recently received great interest, and several U. S. and foreign manufacturers have already begun to market products.","PeriodicalId":252738,"journal":{"name":"Laser Applications to Chemical Analysis","volume":"23 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Laser Spectroscopic Diagnostics for CVD Diamond Growth\",\"authors\":\"R. Shaw, W. Whitten, J. Ramsey\",\"doi\":\"10.1364/laca.1992.tha2\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Chemical vapor deposition (CVD) methods have become increasingly important for the manufacture of technologically-significant thin films. Numerous examples exist in the semiconductor and wear hardening coatings industries. The growth of polycrystalline diamond thin films from light hydrocarbons has recently received great interest, and several U. S. and foreign manufacturers have already begun to market products.\",\"PeriodicalId\":252738,\"journal\":{\"name\":\"Laser Applications to Chemical Analysis\",\"volume\":\"23 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1900-01-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Laser Applications to Chemical Analysis\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1364/laca.1992.tha2\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Laser Applications to Chemical Analysis","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1364/laca.1992.tha2","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Laser Spectroscopic Diagnostics for CVD Diamond Growth
Chemical vapor deposition (CVD) methods have become increasingly important for the manufacture of technologically-significant thin films. Numerous examples exist in the semiconductor and wear hardening coatings industries. The growth of polycrystalline diamond thin films from light hydrocarbons has recently received great interest, and several U. S. and foreign manufacturers have already begun to market products.
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