常压空气微等离子体射流选择性刻蚀聚苯二烯- c薄膜的研制

2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2015-03-02 DOI:10.1109/MEMSYS.2015.7050940

Honglei Guo, Jingquan Liu, Zhaoyu Wang, Xingzhao Wang, Xiang Chen, Bin Yang, Chunsheng Yang

{"title":"常压空气微等离子体射流选择性刻蚀聚苯二烯- c薄膜的研制","authors":"Honglei Guo, Jingquan Liu, Zhaoyu Wang, Xingzhao Wang, Xiang Chen, Bin Yang, Chunsheng Yang","doi":"10.1109/MEMSYS.2015.7050940","DOIUrl":null,"url":null,"abstract":"This paper develops a novel and simple process device based on an atmospheric pressure air microplasma jet for the selective etching of parylene-C film. In order to realize the selective etching, a quartz glass microtube (100 μm, inner diameter) is employed to generate the air microplasma jet. Experimental results demonstrated Micro-holes, micro-trenches on parylene-C film were successfully fabricated by the air microplasma jet without causing any heat damage to films and using any masks, and the etching rate reached 5.14μm/min. Due to its operating at ambient conditions, this process device can be easily integrated with roll-to-roll systems for large-scale manufacturing of flexible electronic devices in the future.","PeriodicalId":337894,"journal":{"name":"2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"18 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2015-03-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":"{\"title\":\"Development of an atmospheric pressure air microplasma jet for the selective etching of parylene-C film\",\"authors\":\"Honglei Guo, Jingquan Liu, Zhaoyu Wang, Xingzhao Wang, Xiang Chen, Bin Yang, Chunsheng Yang\",\"doi\":\"10.1109/MEMSYS.2015.7050940\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This paper develops a novel and simple process device based on an atmospheric pressure air microplasma jet for the selective etching of parylene-C film. In order to realize the selective etching, a quartz glass microtube (100 μm, inner diameter) is employed to generate the air microplasma jet. Experimental results demonstrated Micro-holes, micro-trenches on parylene-C film were successfully fabricated by the air microplasma jet without causing any heat damage to films and using any masks, and the etching rate reached 5.14μm/min. Due to its operating at ambient conditions, this process device can be easily integrated with roll-to-roll systems for large-scale manufacturing of flexible electronic devices in the future.\",\"PeriodicalId\":337894,\"journal\":{\"name\":\"2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)\",\"volume\":\"18 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2015-03-02\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"2\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/MEMSYS.2015.7050940\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MEMSYS.2015.7050940","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 2

摘要

本文研制了一种基于常压空气微等离子体射流的新型、简单的选择性刻蚀聚苯二烯- c膜的工艺装置。为了实现选择性蚀刻，采用内径为100 μm的石英玻璃微管产生空气微等离子体射流。实验结果表明，利用空气微等离子体射流在聚苯乙烯- c薄膜上成功制备了微孔、微沟，且没有对薄膜造成热损伤，也没有使用任何掩膜，刻蚀速率达到5.14μm/min。由于其在环境条件下工作，该工艺装置可以很容易地与卷对卷系统集成，用于未来柔性电子设备的大规模制造。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

查看原文本刊更多论文

Development of an atmospheric pressure air microplasma jet for the selective etching of parylene-C film

This paper develops a novel and simple process device based on an atmospheric pressure air microplasma jet for the selective etching of parylene-C film. In order to realize the selective etching, a quartz glass microtube (100 μm, inner diameter) is employed to generate the air microplasma jet. Experimental results demonstrated Micro-holes, micro-trenches on parylene-C film were successfully fabricated by the air microplasma jet without causing any heat damage to films and using any masks, and the etching rate reached 5.14μm/min. Due to its operating at ambient conditions, this process device can be easily integrated with roll-to-roll systems for large-scale manufacturing of flexible electronic devices in the future.

求助全文

通过发布文献求助，成功后即可免费获取论文全文。去求助

来源期刊

2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

自引率

0.00%

发文量