基于COMSOL多物理场的双晶片悬臂式MEMS开关的拉入电压

2018 International Conference on Circuits and Systems in Digital Enterprise Technology (ICCSDET) Pub Date : 2018-12-01 DOI:10.1109/ICCSDET.2018.8821181

Vijay Mallappa Peerapur, A. Nandi

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引用次数: 2

摘要

本文对双晶片静电驱动悬臂梁的拉入电压进行了研究。静电驱动需要非常高的驱动电压来拉动悬臂梁。采用双晶片悬臂梁可以降低驱动电压。使用COMSOL Multiphysics机电接口模拟拉入电压。比较了不同双晶圆悬臂梁材料的拉入电压。分析和仿真结果表明，铝和金双晶片悬臂梁的拉入电压为4.05V，比模拟的其他双晶片悬臂梁材料的拉入电压要低。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Pull-in Voltage of Bimorph Cantilever Based MEMS Switch Using COMSOL Multiphysics

This paper presents the pull-in voltage study of Bimorph electrostatic actuated Cantilever beam. Electrostatic actuation requires very high actuation Voltage to pull the cantilever. Bimorph Cantilever beam could be used to reduce the actuation Voltage. COMSOL Multiphysics Electromechanics interface is used to simulate the Pull-in Voltage. We Compare the Pull-in Voltage of different Bimorph Cantilever beam Materials. The Analytical and Simulation result shows that the pull-in voltage of Aluminum and Gold Bimorph Cantilever is 4.05V and is less compared to other Bimorph Cantilever beam materials simulated.

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2018 International Conference on Circuits and Systems in Digital Enterprise Technology (ICCSDET)

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