钛扩散铌酸锂波导器件

Niobate Waveguioes
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引用次数: 58

摘要

基于铌酸锂衬底的光波导器件目前处于先进状态。已经演示了各种各样的设备;多个实验室对制造参数进行了优化;例如,波导器件在远距离高比特率系统中作为外部调制器的性能得到了改善。事实上,研究级设备的原型现在已经商业化了。铌酸锂具有几个重要的特性,特别是其良好的电光和声光系数,使其对波导器件具有吸引力。然而,同样重要的是,铌酸锂在商业上很容易在大型衬底(7.5厘米晶圆)上获得。此外,它相对容易加工,其材料性能已被广泛研究和记录。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Titanium-Diffused Lithium Niobate Waveguide Devices
Optical waveguide devices based upon lithium niobate substrates are presently in an advanced state. A large variety of devices have been demonstrated; fabrication parameters have been optimized by several laboratories; and waveguide devices have shown, for example, improved performance as external modulators in long-distance high-bit-rate systems. In fact, prototype research-grade devices are now commercially available. Lithium niobate has several important charateristics that make it attrative for waveguide devices, in particular its good electro-optic and acousto-optic coefficients. However, equally important is the fact that lithium niobate is readily available commercially in large substrates (7.5 cm wafers). Furthermore it is relatively easily processed and its material properties have been studied and documented extensively.
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