Micromechanical optical spectral devices with electrostatic control

Interference filters are widely used in physical research, measuring equipment, and industry [1,2]. Their advantages are simplicity and comfort of operation, high monochromaticity of radiation emitted from optical filter. Such devices can get additional advantages, if they are able to tune the allocated bandwidth, that can be achieved using micro- and nanotechnology [3,4]. In the tunable interference optic filters [3,4] the Electric control of the air gap between the mirrors of the Fabry-Perot is used at the gap corresponding to the first order of interference. In the multiplex filter version considered in the report, achievable tuning free range of the spectrum is 0,4–0,8 µm with a resolution of 0,75–1,3 nm.