用于高精度旋转的圆柱形磁悬浮台

J. Jeon, Jong-Moon Kim
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引用次数: 2

摘要

本文介绍了一种新型的圆柱形磁悬浮台。该工作台可以实现气缸的旋转、平移以及高精度的磁悬浮。该工作台可旋转360°,并可在几毫米内移动到平移方向。位置控制采用导联-PI控制算法,电流控制采用PI控制算法。采用一种基于输入输出实验数据的系统识别方法进行了二阶状态空间动态建模。利用该模型合理地确定了铅- pi控制参数。对新型圆柱形磁悬浮平台进行了纳米级精度的定位和旋转实验。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
A cylindrical magnetic levitation stage for high-precision rotations
The new cylindrical magnetic levitation stage is presented in this paper. This stage can move the cylinder to rotations and translations as well as magnetic levitations with high precision. This stage can be rotated with 360° and can be moved to translational directions within few millimeters. A Lead-PI control algorithm is used for the position control and a PI control algorithm is used for the current control. A system identification method from input and output experimental data is used for 2nd-order State-space dynamic modeling. Parameters of Lead-PI control is decided properly with this model. The new cylindrical mag-lev stage is experimented with in-positioning and rotations with nano-scale precisions.
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