碳纳米管平面栅电子源的实验研究

2006 19th International Vacuum Nanoelectronics Conference Pub Date : 2006-07-17 DOI:10.1109/IVNC.2006.335375

Wenhui Lu, Hang Song, Haifeng Zhao, H Zhao, Zhiming Li, Hong Jiang, Guoqing Mao, Yixin Jin

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引用次数: 0

摘要

采用特殊的电泳方法制备了平面栅型碳纳米管场发射电子源。仿真和实验结果表明，栅极电压可以有效地控制纳米管的电子发射。该电子源制备工艺简单，结构简单，可用于许多实用的真空微电子器件中

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Experiment Study on Planar-Gate Electron Source with CNT

Planar-gate type carbon nanotubes field emission electron sources were fabricated with special electrophoretic method. The simulation and experiment results showed electron emission from the nanotubes could be controlled effectively by the gate voltage. The easy fabrication process and simple structure will lead to the electron sources used in many practical vacuum microelectron devices

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2006 19th International Vacuum Nanoelectronics Conference

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