等离子体诊断用高纵横比圆柱形探头作为阻抗探头

D. Walker, R. Fernsler, D. Blackwell, W. Amatucci
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引用次数: 0

摘要

利用网络分析仪向等离子体中不同尺寸的球形探针提供驱动射频信号,我们利用基于薄护套和无碰撞等离子体假设的理论进行了等离子体诊断。与探头偏置电压相比,网络分析仪施加到探头上的射频信号的幅度很小,对于给定的偏置电压,仪器可以返回复杂等离子体阻抗的实部和虚部,作为频率的函数。这些信息可以用来确定等离子体势、电子密度和温度,以及电子分布函数。1,2此外,我们已经表明,护套阻力和护套密度剖面也是该方法的产物。研究的理论基础表明,在薄护套极限下,测量结果不受探针几何形状的影响。为了测试这一点,我们使用了一个100-1(长度-半径)宽高比的圆柱体,我们也将其作为朗缪尔探针进行扫描。我们将基于阻抗的等离子体测量结果与使用传统算法降低I-V特性的朗缪尔探针扫描圆柱体时的测量结果进行了比较。该方法在实验室和空间等离子体测量中都有广泛的应用
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Plasma diagnostics with a high-aspect ratio cylindrical probe used as an impedance probe
Using a network analyzer to supply a driving rf signal to varying sizes of spherical probes in plasma, we have performed plasma diagnostics using theory based on an assumption of a thin sheath and a collisionless plasma. The rf signal applied to the probe by the network analyzer is small in magnitude compared to probe bias voltages and the instrument returns both real and imaginary parts of the complex plasma impedance as a function of frequency for given bias voltages. This information can be used to determine plasma potential, electron density and temperature, in addition to the electron distribution function.1,2 Further, we have shown that sheath resistance and sheath density profiles are also a product of the method. The theoretical basis of the work indicates that in the thin sheath limit the results should be independent of probe geometry. To test this we have used a 100-1 (length - radius) aspect ratio cylinder which we also sweep as a Langmuir probe. We compare the impedance-based plasma measurements to those of the cylinder when swept as a Langmuir probe using conventional algorithms to reduce the I–V characteristic. This method has general application to either laboratory or space plasma measurement
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