铜ULSI互连电迁移试验中焦耳加热的分析、估计及影响

2019 International Conference on Ubiquitous and Emerging Concepts on Sensors and Transducers (UEMCOS) Pub Date : 2019-04-01 DOI:10.1109/UEMCOS46508.2019.9221625

A. Adhikari, A. Roy

{"title":"铜ULSI互连电迁移试验中焦耳加热的分析、估计及影响","authors":"A. Adhikari, A. Roy","doi":"10.1109/UEMCOS46508.2019.9221625","DOIUrl":null,"url":null,"abstract":"Joule heating significantly affect the electromigration performance of ULSI interconnect. The experimental determination of electromigration parameters such as activation energy, current density exponent without considering Joule heating leads significantly wrong estimation of these parameters which in turn resulted wrong estimation of extrapolated life-time. Theoretically, the Joule heating is shown to be non-linear with the test temperature and is verified by experiments. Experimental procedure for estimating Joule heat in the electromigration test of ULSI interconnects is described. The impact of Joule heating on the estimation of electromigration related parameters is presented.","PeriodicalId":339373,"journal":{"name":"2019 International Conference on Ubiquitous and Emerging Concepts on Sensors and Transducers (UEMCOS)","volume":"1971 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2019-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Analysis, Estimation and Impact of Joule Heating in the Electromigration Test of Copper ULSI Interconnects\",\"authors\":\"A. Adhikari, A. Roy\",\"doi\":\"10.1109/UEMCOS46508.2019.9221625\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Joule heating significantly affect the electromigration performance of ULSI interconnect. The experimental determination of electromigration parameters such as activation energy, current density exponent without considering Joule heating leads significantly wrong estimation of these parameters which in turn resulted wrong estimation of extrapolated life-time. Theoretically, the Joule heating is shown to be non-linear with the test temperature and is verified by experiments. Experimental procedure for estimating Joule heat in the electromigration test of ULSI interconnects is described. The impact of Joule heating on the estimation of electromigration related parameters is presented.\",\"PeriodicalId\":339373,\"journal\":{\"name\":\"2019 International Conference on Ubiquitous and Emerging Concepts on Sensors and Transducers (UEMCOS)\",\"volume\":\"1971 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2019-04-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2019 International Conference on Ubiquitous and Emerging Concepts on Sensors and Transducers (UEMCOS)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/UEMCOS46508.2019.9221625\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2019 International Conference on Ubiquitous and Emerging Concepts on Sensors and Transducers (UEMCOS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/UEMCOS46508.2019.9221625","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 0

摘要

焦耳加热对ULSI互连的电迁移性能有显著影响。在没有考虑焦耳加热的情况下，电迁移参数如活化能、电流密度指数的实验测定会导致这些参数的估计严重错误，进而导致外推寿命的估计错误。从理论上讲，焦耳加热与测试温度呈非线性关系，并通过实验加以验证。介绍了ULSI互连电迁移测试中焦耳热估计的实验过程。给出了焦耳加热对电迁移相关参数估计的影响。

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Analysis, Estimation and Impact of Joule Heating in the Electromigration Test of Copper ULSI Interconnects

Joule heating significantly affect the electromigration performance of ULSI interconnect. The experimental determination of electromigration parameters such as activation energy, current density exponent without considering Joule heating leads significantly wrong estimation of these parameters which in turn resulted wrong estimation of extrapolated life-time. Theoretically, the Joule heating is shown to be non-linear with the test temperature and is verified by experiments. Experimental procedure for estimating Joule heat in the electromigration test of ULSI interconnects is described. The impact of Joule heating on the estimation of electromigration related parameters is presented.

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2019 International Conference on Ubiquitous and Emerging Concepts on Sensors and Transducers (UEMCOS)

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