等离子体辅助化学气相沉积光学干涉滤光片的建模与控制

Proceedings of the Second International Conference on Intelligent Processing and Manufacturing of Materials. IPMM'99 (Cat. No.99EX296) Pub Date : 1999-07-01 DOI:10.1109/IPMM.1999.792476

D. Linkens, M. Abbod, J. Metcalfe, B. Nichols

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引用次数: 3

摘要

利用微波等离子体辅助化学气相沉积技术，设计并制备了具有连续调制折射率的干涉滤光片。智能建模和控制技术用于模拟过程和提高反射滤波器的再现性。

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Modelling and control of optical interference filters using plasma assisted chemical vapour deposition

Optical interference filters with continuously modulated refractive indices throughout their thickness (rugates) are designed and fabricated using microwave plasma-assisted chemical vapour deposition techniques. Intelligent modelling and control techniques are used to model the process and improve the reproducibility of reflection filters.

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Proceedings of the Second International Conference on Intelligent Processing and Manufacturing of Materials. IPMM'99 (Cat. No.99EX296)

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