Multifunctional Z Actuator with an Adjustable Built-in Gravity Compensator for High Precision Systems

A novel design of a linear actuator with negative stiffness and an adjustable built-in gravity compensator is presented in this paper. This actuator coupled with flexural elements provides a compact solution to accurately position a wafer for high precision systems. Operating principle is described and the performance is experimentally confirmed. The robustness of the magnetic design is experimentally verified. The proposed solution is integrated in an industrial product and some results demonstrating high performance are presented.